Authors:

Mitesh Mylvaganan

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About Paper:

In this work, we showcase a highly sensitive capacitive pressure sensors using the hybrid structure of a 3D printed substrate and conducting polymer. The sensor will be small at dimensions of 10mmx10mmx3mm. Capacitive pressure sensors measure changes in electrical capacitance caused by applied pressure. The previous methods of fabricating capacitive pressure sensors currently include mold-based slow or expensive micropatterning methods such as injection molding or Si-based photolithography. In comparison to micropatterning, 3D printing is advantageous in terms of process simplification and efficiency since it excludes the complicated mold-based manufacturing process. The Liquid Crystal Display (LCD)-based vat photopolymerization (VPP) was leveraged to manufacture the pressure sensor's substrate with a high- resolution (x-y resolution of 28.5 um) multiscale pattern. In addition, a nanoscale poly(3,4- ethylenedioxythiophene) (PEDOT) layer is coated on the 3D-printed microstructure pattern using Oxidative chemical vapor deposition(oCVD). OCVD PEDOT was used because of its excellent step coverages, mechanical flexibility, and tunable conductivity. To investigate the effect of dimensional parameters on the sensing performance, porosity of the dielectric layer was controlled from 0.4 to 0.9. The figure of merit performance of pressure sensor such as sensitivity, response time, limit of detection, and linearity range was measured with varying porosity. We hope to produce a fully functional sensor that can be mass manufactured quickly and inexpensively. Sensors of this size and sensitivity have applications in smart watches and medical applications.

Source:

Purdue University / 2023

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Co-authors:

Mitesh Mylvaganan